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SiGe double clamped beam MEM resonators for DNA sensing

dc.contributor.authorKhaled, Ahmad
dc.contributor.authorRaoof, Moatassim
dc.contributor.authorCherman, Vladimir
dc.contributor.authorAbbas, Mohamed
dc.contributor.authorDe Wolf, Ingrid
dc.contributor.authorWitvrouw, Ann
dc.date.accessioned2021-10-20T12:12:46Z
dc.date.available2021-10-20T12:12:46Z
dc.date.issued2012
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/20926
dc.sourceIIOimport
dc.titleSiGe double clamped beam MEM resonators for DNA sensing
dc.typeProceedings paper
dc.contributor.imecauthorKhaled, Ahmad
dc.contributor.imecauthorCherman, Vladimir
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.orcidimecKhaled, Ahmad::0000-0003-2892-3176
dc.contributor.orcidimecDe Wolf, Ingrid::0000-0003-3822-5953
dc.source.peerreviewyes
dc.source.beginpage363
dc.source.endpage365
dc.source.conference2nd Saudi International Nanotechnology Conference - 2SINC
dc.source.conferencedate11/11/2012
dc.source.conferencelocationRiyadh Saudi Arabia
imec.availabilityPublished - imec
imec.internalnotesP97


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