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Effect of the functionalization process on the performance of SiGe MEM resonators used for bio-molecular sensing

dc.contributor.authorKhaled, Ahmad
dc.contributor.authorRaoof, Moatassim
dc.contributor.authorCherman, Vladimir
dc.contributor.authorJans, Karolien
dc.contributor.authorAbbas, Mohamed
dc.contributor.authorEbrahim, Shaker
dc.contributor.authorBryce, George
dc.contributor.authorVerheyen, Peter
dc.contributor.authorWitvrouw, Ann
dc.contributor.authorDe Wolf, Ingrid
dc.date.accessioned2021-10-20T12:13:09Z
dc.date.available2021-10-20T12:13:09Z
dc.date.issued2012
dc.identifier.issn0026-2714
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/20927
dc.sourceIIOimport
dc.titleEffect of the functionalization process on the performance of SiGe MEM resonators used for bio-molecular sensing
dc.typeJournal article
dc.contributor.imecauthorKhaled, Ahmad
dc.contributor.imecauthorCherman, Vladimir
dc.contributor.imecauthorJans, Karolien
dc.contributor.imecauthorBryce, George
dc.contributor.imecauthorVerheyen, Peter
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.orcidimecKhaled, Ahmad::0000-0003-2892-3176
dc.contributor.orcidimecDe Wolf, Ingrid::0000-0003-3822-5953
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage2272
dc.source.endpage2277
dc.source.journalMicroelectronics Reliability
dc.source.issue9_10
dc.source.volume52
dc.identifier.urlhttp://dx.doi.org/10.1016/j.micorrel.2012.06.010
imec.availabilityPublished - open access


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