Authors

Khaled, Ahmad; Raoof, Moatassim; Cherman, Vladimir; Jans, Karolien; Abbas, Mohamed; Ebrahim, Shaker; Bryce, George; Verheyen, Peter; Witvrouw, Ann; De Wolf, Ingrid

ISSN

0026-2714

Issue

9_10

Journal

Microelectronics Reliability

Volume

52

Title

Effect of the functionalization process on the performance of SiGe MEM resonators used for bio-molecular sensing

Publication type

Journal article

Embargo date

9999-12-31