Publication:

Effect of the functionalization process on the performance of SiGe MEM resonators used for bio-molecular sensing

Date

2012
Journal article
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dc.contributor.authorKhaled, Ahmad
dc.contributor.authorRaoof, Moatassim
dc.contributor.authorCherman, Vladimir
dc.contributor.authorJans, Karolien
dc.contributor.authorAbbas, Mohamed
dc.contributor.authorEbrahim, Shaker
dc.contributor.authorBryce, George
dc.contributor.authorVerheyen, Peter
dc.contributor.authorWitvrouw, Ann
dc.contributor.authorDe Wolf, Ingrid
dc.contributor.imecauthorKhaled, Ahmad
dc.contributor.imecauthorCherman, Vladimir
dc.contributor.imecauthorJans, Karolien
dc.contributor.imecauthorBryce, George
dc.contributor.imecauthorVerheyen, Peter
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.orcidimecKhaled, Ahmad::0000-0003-2892-3176
dc.contributor.orcidimecDe Wolf, Ingrid::0000-0003-3822-5953
dc.date.accessioned2021-10-20T12:13:09Z
dc.date.available2021-10-20T12:13:09Z
dc.date.embargo9999-12-31
dc.date.issued2012
dc.identifier.issn0026-2714
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/20927
dc.identifier.urlhttp://dx.doi.org/10.1016/j.micorrel.2012.06.010
dc.source.beginpage2272
dc.source.endpage2277
dc.source.issue9_10
dc.source.journalMicroelectronics Reliability
dc.source.volume52
dc.title

Effect of the functionalization process on the performance of SiGe MEM resonators used for bio-molecular sensing

dc.typeJournal article
dspace.entity.typePublication
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