Publication:

Effect of the functionalization process on the performance of SiGe MEM resonators used for bio-molecular sensing

Date

2012

Journal article

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Files

24994.pdf 947.71 KB

Author(s)

;

Raoof, Moatassim

;

Cherman, Vladimir

;

;

;

Ebrahim, Shaker

;

;

Verheyen, Peter

;

;

De Wolf, Ingrid

Journal

Microelectronics Reliability

Statistics

1929 since deposited on 2021-10-20

3last month

Acq. date: 2026-08-28