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Effect of the functionalization process on the performance of SiGe MEM resonators used for bio-molecular sensing
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Effect of the functionalization process on the performance of SiGe MEM resonators used for bio-molecular sensing
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Date
2012
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Khaled, Ahmad
;
Raoof, Moatassim
;
Cherman, Vladimir
;
Jans, Karolien
;
Abbas, Mohamed
;
Ebrahim, Shaker
;
Bryce, George
;
Verheyen, Peter
;
Witvrouw, Ann
;
De Wolf, Ingrid
Journal
Microelectronics Reliability
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1926
since deposited on 2021-10-20
Acq. date: 2025-12-15
Citations
Metrics
Views
1926
since deposited on 2021-10-20
Acq. date: 2025-12-15
Citations