Thermal oxidation of a densely packed array of vertical Si nanowires

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Authors

Kurstjens, Rufi; Vos, Ingrid; Dross, Frederic; Poortmans, Jef; Mertens, Robert

ISSN

0013-4651

Issue

3

Journal

Journal of the Electrochemical Society

Volume

159

Title

Thermal oxidation of a densely packed array of vertical Si nanowires

Publication type

Journal article

Embargo date

9999-12-31

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