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Thermal oxidation of a densely packed array of vertical Si nanowires

dc.contributor.authorKurstjens, Rufi
dc.contributor.authorVos, Ingrid
dc.contributor.authorDross, Frederic
dc.contributor.authorPoortmans, Jef
dc.contributor.authorMertens, Robert
dc.date.accessioned2021-10-20T12:27:31Z
dc.date.available2021-10-20T12:27:31Z
dc.date.issued2012
dc.identifier.issn0013-4651
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/20970
dc.sourceIIOimport
dc.titleThermal oxidation of a densely packed array of vertical Si nanowires
dc.typeJournal article
dc.contributor.imecauthorKurstjens, Rufi
dc.contributor.imecauthorVos, Ingrid
dc.contributor.imecauthorPoortmans, Jef
dc.contributor.imecauthorMertens, Robert
dc.contributor.orcidimecPoortmans, Jef::0000-0003-2077-2545
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpageH300
dc.source.endpageH306
dc.source.journalJournal of the Electrochemical Society
dc.source.issue3
dc.source.volume159
imec.availabilityPublished - open access


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