Show simple item record

Wet clean applications in porous low-k patterning processes

dc.contributor.authorLe, Quoc Toan
dc.contributor.authorVereecke, Guy
dc.contributor.authorStruyf, Herbert
dc.contributor.authorKesters, Els
dc.contributor.authorBaklanov, Mikhaïl
dc.date.accessioned2021-10-20T12:35:27Z
dc.date.available2021-10-20T12:35:27Z
dc.date.issued2012
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/20994
dc.sourceIIOimport
dc.titleWet clean applications in porous low-k patterning processes
dc.typeBook chapter
dc.contributor.imecauthorLe, Quoc Toan
dc.contributor.imecauthorVereecke, Guy
dc.contributor.imecauthorStruyf, Herbert
dc.contributor.imecauthorKesters, Els
dc.contributor.orcidimecLe, Quoc Toan::0000-0002-0206-6279
dc.contributor.orcidimecVereecke, Guy::0000-0001-9058-9338
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage129
dc.source.bookAdvanced Interconnects for ULSI Technology
dc.source.endpage172
imec.availabilityPublished - open access


Files in this item

Thumbnail
Name:
23339.pdf
Size:
94.04Kb
Format:
PDF
View/open

This item appears in the following collection(s)

Show simple item record