Wet clean applications in porous low-k patterning processes

Thumbnail
View/open
Metadata
Show full item record
Authors
Le, Quoc Toan; Vereecke, Guy; Struyf, Herbert; Kesters, Els; Baklanov, Mikhaïl
Book
Advanced Interconnects for ULSI Technology
Title
Wet clean applications in porous low-k patterning processes
Publication type
Book chapter
Embargo date
9999-12-31
Collections