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Fine patterning of electrets for sensors and energy harvesters

dc.contributor.authorLeonov, Vladimir
dc.contributor.authorGoedbloed, Martijn
dc.contributor.authorde Nooijer, Christine
dc.contributor.authorvan Schaijk, Rob
dc.date.accessioned2021-10-20T12:37:39Z
dc.date.available2021-10-20T12:37:39Z
dc.date.issued2012-10
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/21001
dc.sourceIIOimport
dc.titleFine patterning of electrets for sensors and energy harvesters
dc.typeProceedings paper
dc.contributor.imecauthorLeonov, Vladimir
dc.contributor.imecauthorde Nooijer, Christine
dc.contributor.orcidimecLeonov, Vladimir::0000-0002-4364-8945
dc.source.peerreviewyes
dc.source.beginpage1806
dc.source.endpage1809
dc.source.conferenceIEEE Sensors Conference
dc.source.conferencedate28/10/2012
dc.source.conferencelocationTaipei Taiwan
imec.availabilityPublished - imec


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