Show simple item record

Electrochemical, physical, and electrical characterization of two clean solutions for Cu PCMP clean

dc.contributor.authorLi, Yunlong
dc.contributor.authorHeylen, Nancy
dc.contributor.authorDaviot, Jerome
dc.contributor.authorReid, Chris
dc.contributor.authorLeunissen, Peter
dc.date.accessioned2021-10-20T12:44:12Z
dc.date.available2021-10-20T12:44:12Z
dc.date.issued2012-04
dc.identifier.issn1662-9779
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/21020
dc.sourceIIOimport
dc.titleElectrochemical, physical, and electrical characterization of two clean solutions for Cu PCMP clean
dc.typeJournal article
dc.contributor.imecauthorLi, Yunlong
dc.contributor.imecauthorHeylen, Nancy
dc.contributor.orcidimecLi, Yunlong::0000-0003-4791-4013
dc.source.peerreviewyes
dc.source.beginpage235
dc.source.endpage239
dc.source.journalSolid State Phenomena
dc.source.volume187
dc.identifier.urlwww.scientific.net/SSP.187.235
imec.availabilityPublished - imec
imec.internalnotesPaper from the 10th Int. Symp. on Ultra Clean Processing of Semiconductor Surfaces (UCPSS) 2010


Files in this item

FilesSizeFormatView

There are no files associated with this item.

This item appears in the following collection(s)

Show simple item record