dc.contributor.author | Li, Yunlong | |
dc.contributor.author | Heylen, Nancy | |
dc.contributor.author | Daviot, Jerome | |
dc.contributor.author | Reid, Chris | |
dc.contributor.author | Leunissen, Peter | |
dc.date.accessioned | 2021-10-20T12:44:12Z | |
dc.date.available | 2021-10-20T12:44:12Z | |
dc.date.issued | 2012-04 | |
dc.identifier.issn | 1662-9779 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/21020 | |
dc.source | IIOimport | |
dc.title | Electrochemical, physical, and electrical characterization of two clean solutions for Cu PCMP clean | |
dc.type | Journal article | |
dc.contributor.imecauthor | Li, Yunlong | |
dc.contributor.imecauthor | Heylen, Nancy | |
dc.contributor.orcidimec | Li, Yunlong::0000-0003-4791-4013 | |
dc.source.peerreview | yes | |
dc.source.beginpage | 235 | |
dc.source.endpage | 239 | |
dc.source.journal | Solid State Phenomena | |
dc.source.volume | 187 | |
dc.identifier.url | www.scientific.net/SSP.187.235 | |
imec.availability | Published - imec | |
imec.internalnotes | Paper from the 10th Int. Symp. on Ultra Clean Processing of Semiconductor Surfaces (UCPSS) 2010 | |