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A simple, cost effective and very sensitive alternative for photon emission spectroscopy

dc.contributor.authorRasras, Mahmoud
dc.contributor.authorDe Wolf, Ingrid
dc.contributor.authorGroeseneken, Guido
dc.contributor.authorMaes, Herman
dc.contributor.authorVanhaeverbeke, S.
dc.contributor.authorDe Pauw, P.
dc.date.accessioned2021-09-30T09:26:40Z
dc.date.available2021-09-30T09:26:40Z
dc.date.issued1997
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/2103
dc.sourceIIOimport
dc.titleA simple, cost effective and very sensitive alternative for photon emission spectroscopy
dc.typeProceedings paper
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.imecauthorGroeseneken, Guido
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage153
dc.source.endpage157
dc.source.conferenceProceedings 23rd International Symposium for Testing and Failure Analysis - ISTFA
dc.source.conferencedate27/10/1997
dc.source.conferencelocationSanta Clara, CA USA
imec.availabilityPublished - open access


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