dc.contributor.author | Lofrano, Melina | |
dc.contributor.author | Wilson, Chris | |
dc.contributor.author | Croes, Kristof | |
dc.date.accessioned | 2021-10-20T12:55:07Z | |
dc.date.available | 2021-10-20T12:55:07Z | |
dc.date.issued | 2012 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/21051 | |
dc.source | IIOimport | |
dc.title | A calibrated FEM study of the influence of line width, line spacing and dielectric E modulus on stress and stress gradients in BEOL copper interconnects | |
dc.type | Meeting abstract | |
dc.contributor.imecauthor | Lofrano, Melina | |
dc.contributor.imecauthor | Wilson, Chris | |
dc.contributor.imecauthor | Croes, Kristof | |
dc.contributor.orcidimec | Croes, Kristof::0000-0002-3955-0638 | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | no | |
dc.source.beginpage | P3-08 | |
dc.source.conference | Materials for Advanced Metallization - MAM | |
dc.source.conferencedate | 11/03/2012 | |
dc.source.conferencelocation | Grenoble France | |
imec.availability | Published - open access | |