Nanoscale noncontact subsurface investigations of mechanical and optical properties of nanoporous low-k material thin films
dc.contributor.author | Lomonosov, Alexey | |
dc.contributor.author | Ayouch, Adil | |
dc.contributor.author | Ruello, Pascal | |
dc.contributor.author | Vaudel, Gwenaele | |
dc.contributor.author | Baklanov, Mikhaïl | |
dc.contributor.author | Verdonck, Patrick | |
dc.contributor.author | Zhao, Larry | |
dc.contributor.author | Gusev, Vitalyi | |
dc.date.accessioned | 2021-10-20T12:55:30Z | |
dc.date.available | 2021-10-20T12:55:30Z | |
dc.date.issued | 2012 | |
dc.identifier.issn | 1936-0851 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/21052 | |
dc.source | IIOimport | |
dc.title | Nanoscale noncontact subsurface investigations of mechanical and optical properties of nanoporous low-k material thin films | |
dc.type | Journal article | |
dc.contributor.imecauthor | Verdonck, Patrick | |
dc.contributor.orcidimec | Verdonck, Patrick::0000-0003-2454-0602 | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | yes | |
dc.source.beginpage | 1410 | |
dc.source.endpage | 1415 | |
dc.source.journal | ACS Nano | |
dc.source.issue | 2 | |
dc.source.volume | 6 | |
imec.availability | Published - open access |