dc.contributor.author | Loo, Roger | |
dc.contributor.author | Vincent, Benjamin | |
dc.contributor.author | Hikavyy, Andriy | |
dc.contributor.author | Gencarelli, Federica | |
dc.contributor.author | Eneman, Geert | |
dc.contributor.author | Witters, Liesbeth | |
dc.contributor.author | Mitard, Jerome | |
dc.contributor.author | Hellings, Geert | |
dc.contributor.author | Sioncke, Sonja | |
dc.contributor.author | Bender, Hugo | |
dc.contributor.author | Eyben, Pierre | |
dc.contributor.author | Caymax, Matty | |
dc.contributor.author | Vandervorst, Wilfried | |
dc.contributor.author | Thean, Aaron | |
dc.date.accessioned | 2021-10-20T12:58:11Z | |
dc.date.available | 2021-10-20T12:58:11Z | |
dc.date.issued | 2012-09 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/21059 | |
dc.source | IIOimport | |
dc.title | Epitaxial growth in advanced SiGe and Ge MOS devices: challenges and solutions | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Loo, Roger | |
dc.contributor.imecauthor | Vincent, Benjamin | |
dc.contributor.imecauthor | Hikavyy, Andriy | |
dc.contributor.imecauthor | Eneman, Geert | |
dc.contributor.imecauthor | Witters, Liesbeth | |
dc.contributor.imecauthor | Mitard, Jerome | |
dc.contributor.imecauthor | Hellings, Geert | |
dc.contributor.imecauthor | Bender, Hugo | |
dc.contributor.imecauthor | Eyben, Pierre | |
dc.contributor.imecauthor | Caymax, Matty | |
dc.contributor.imecauthor | Vandervorst, Wilfried | |
dc.contributor.imecauthor | Thean, Aaron | |
dc.contributor.orcidimec | Loo, Roger::0000-0003-3513-6058 | |
dc.contributor.orcidimec | Hikavyy, Andriy::0000-0002-8201-075X | |
dc.contributor.orcidimec | Eneman, Geert::0000-0002-5849-3384 | |
dc.contributor.orcidimec | Mitard, Jerome::0000-0002-7422-079X | |
dc.contributor.orcidimec | Hellings, Geert::0000-0002-5376-2119 | |
dc.source.peerreview | yes | |
dc.source.conference | IUMRS-International Conference on Electronic Materials - IUMS-ICEM | |
dc.source.conferencedate | 23/09/2012 | |
dc.source.conferencelocation | Yokohama Japan | |
imec.availability | Published - imec | |