High efficiency low temperature pre-epi clean method for advanced group IV epi processing

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Authors
Machkaoutsan, Vladimir; Weeks, Doran; Bauer, Matthias; Maes, Jan; Tolle, John; Thomas, Shawn; Alian, AliReza; Hikavyy, Andriy; Loo, Roger
Conference
222nd ECS Meeting, Pacific RIM Meeting on Electrochemical and Solid-State Science
Title
High efficiency low temperature pre-epi clean method for advanced group IV epi processing
Publication type
Meeting abstract
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