dc.contributor.author | Mannaert, Geert | |
dc.contributor.author | Paraschiv, Vasile | |
dc.contributor.author | De Jaeger, Brice | |
dc.contributor.author | Van Hove, Marleen | |
dc.contributor.author | Demand, Marc | |
dc.contributor.author | Decoutere, Stefaan | |
dc.contributor.author | Boullart, Werner | |
dc.date.accessioned | 2021-10-20T13:10:46Z | |
dc.date.available | 2021-10-20T13:10:46Z | |
dc.date.issued | 2012 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/21092 | |
dc.source | IIOimport | |
dc.title | Development of AlGaN recess etch for Emode POWER HEMTs | |
dc.type | Meeting abstract | |
dc.contributor.imecauthor | Mannaert, Geert | |
dc.contributor.imecauthor | Paraschiv, Vasile | |
dc.contributor.imecauthor | De Jaeger, Brice | |
dc.contributor.imecauthor | Demand, Marc | |
dc.contributor.imecauthor | Decoutere, Stefaan | |
dc.contributor.imecauthor | Boullart, Werner | |
dc.contributor.orcidimec | De Jaeger, Brice::0000-0001-8804-7556 | |
dc.contributor.orcidimec | Decoutere, Stefaan::0000-0001-6632-6239 | |
dc.contributor.orcidimec | Boullart, Werner::0000-0001-7614-2097 | |
dc.source.peerreview | yes | |
dc.source.conference | Plasma Etch and Strip in Microelectronics - PESM | |
dc.source.conferencedate | 15/03/2012 | |
dc.source.conferencelocation | Grenoble France | |
imec.availability | Published - imec | |