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CMOS compatible heater fabrication approaches for thermal tuning of photonics devices

dc.contributor.authorMasood, Adil
dc.contributor.authorPantouvaki, Marianna
dc.contributor.authorGoossens, Danny
dc.contributor.authorLepage, Guy
dc.contributor.authorVerheyen, Peter
dc.contributor.authorVan Thourhout, Dries
dc.contributor.authorAbsil, Philippe
dc.contributor.authorBogaerts, Wim
dc.date.accessioned2021-10-20T13:21:02Z
dc.date.available2021-10-20T13:21:02Z
dc.date.issued2012
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/21119
dc.sourceIIOimport
dc.titleCMOS compatible heater fabrication approaches for thermal tuning of photonics devices
dc.typeProceedings paper
dc.contributor.imecauthorMasood, Adil
dc.contributor.imecauthorPantouvaki, Marianna
dc.contributor.imecauthorGoossens, Danny
dc.contributor.imecauthorLepage, Guy
dc.contributor.imecauthorVerheyen, Peter
dc.contributor.imecauthorVan Thourhout, Dries
dc.contributor.imecauthorAbsil, Philippe
dc.contributor.imecauthorBogaerts, Wim
dc.contributor.orcidimecVan Thourhout, Dries::0000-0003-0111-431X
dc.contributor.orcidimecBogaerts, Wim::0000-0003-1112-8950
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage307
dc.source.endpage310
dc.source.conferenceProceedings of the Annual Symposium of the IEEE Photonics Society Benelux Chapter
dc.source.conferencedate29/11/2012
dc.source.conferencelocationMons Belgium
imec.availabilityPublished - open access


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