dc.contributor.author | Masood, Adil | |
dc.contributor.author | Pantouvaki, Marianna | |
dc.contributor.author | Goossens, Danny | |
dc.contributor.author | Lepage, Guy | |
dc.contributor.author | Verheyen, Peter | |
dc.contributor.author | Van Thourhout, Dries | |
dc.contributor.author | Absil, Philippe | |
dc.contributor.author | Bogaerts, Wim | |
dc.date.accessioned | 2021-10-20T13:21:02Z | |
dc.date.available | 2021-10-20T13:21:02Z | |
dc.date.issued | 2012 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/21119 | |
dc.source | IIOimport | |
dc.title | CMOS compatible heater fabrication approaches for thermal tuning of photonics devices | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Masood, Adil | |
dc.contributor.imecauthor | Pantouvaki, Marianna | |
dc.contributor.imecauthor | Goossens, Danny | |
dc.contributor.imecauthor | Lepage, Guy | |
dc.contributor.imecauthor | Verheyen, Peter | |
dc.contributor.imecauthor | Van Thourhout, Dries | |
dc.contributor.imecauthor | Absil, Philippe | |
dc.contributor.imecauthor | Bogaerts, Wim | |
dc.contributor.orcidimec | Van Thourhout, Dries::0000-0003-0111-431X | |
dc.contributor.orcidimec | Bogaerts, Wim::0000-0003-1112-8950 | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | yes | |
dc.source.beginpage | 307 | |
dc.source.endpage | 310 | |
dc.source.conference | Proceedings of the Annual Symposium of the IEEE Photonics Society Benelux Chapter | |
dc.source.conferencedate | 29/11/2012 | |
dc.source.conferencelocation | Mons Belgium | |
imec.availability | Published - open access | |