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Comparison of bulk and surface passivation properties of plasma nitrides on Si and SiGe solar cells

dc.contributor.authorSaid, Khalid
dc.contributor.authorBeaucarne, Guy
dc.contributor.authorLibezny, Milan
dc.contributor.authorLaureys, Wim
dc.contributor.authorVinckier, Chris
dc.contributor.authorNijs, Johan
dc.contributor.authorPoortmans, Jef
dc.date.accessioned2021-09-30T09:27:50Z
dc.date.available2021-09-30T09:27:50Z
dc.date.issued1997
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/2111
dc.sourceIIOimport
dc.titleComparison of bulk and surface passivation properties of plasma nitrides on Si and SiGe solar cells
dc.typeProceedings paper
dc.contributor.imecauthorPoortmans, Jef
dc.contributor.orcidimecPoortmans, Jef::0000-0003-2077-2545
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage83
dc.source.endpage86
dc.source.conferenceProceedings 26th IEEE Photovoltaic Specialists Conference
dc.source.conferencedate29/09/1997
dc.source.conferencelocationAnaheim, CA USA
imec.availabilityPublished - open access


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