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III-V high mobility semiconductors for advanced CMOS applications: Epitaxial growth and in-situ passivation

dc.contributor.authorMerckling, Clement
dc.date.accessioned2021-10-20T13:28:44Z
dc.date.available2021-10-20T13:28:44Z
dc.date.issued2012
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/21139
dc.sourceIIOimport
dc.titleIII-V high mobility semiconductors for advanced CMOS applications: Epitaxial growth and in-situ passivation
dc.typeProceedings paper
dc.contributor.imecauthorMerckling, Clement
dc.contributor.orcidimecMerckling, Clement::0000-0003-3084-2543
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.conferenceSemicon Europa
dc.source.conferencedate9/10/2012
dc.source.conferencelocationDresden Germany
imec.availabilityPublished - open access


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