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Exploration of process window for fill of sub 30 nm features by direct plating
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Authors
Nagar, Magi
;
Radisic, Alex
;
Strubbe, Katrien
;
Vereecken, Philippe
Conference
222nd Meeting of the The Electrochemical Society: Symposium E8: Processing Materials of 3D Interconnects
Title
Exploration of process window for fill of sub 30 nm features by direct plating
Publication type
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