Resonantly excited AlN-based microcantilevers for immunosensing

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Authors

Oliver, M.J.; Hernando-Garcia, J.; Ababneh, A.; Seidel, H.; Schmid, U.; Andres, J.P.; Pobedinskas, Paulius; Haenen, Ken

ISSN

0946-7076

Issue

7_8

Journal

Microsystem Technologies

Volume

18

Title

Resonantly excited AlN-based microcantilevers for immunosensing

Publication type

Journal article

Embargo date

9999-12-31

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