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dc.contributor.authorOliver, M.J.
dc.contributor.authorHernando-Garcia, J.
dc.contributor.authorAbabneh, A.
dc.contributor.authorSeidel, H.
dc.contributor.authorSchmid, U.
dc.contributor.authorAndres, J.P.
dc.contributor.authorPobedinskas, Paulius
dc.contributor.authorHaenen, Ken
dc.date.accessioned2021-10-20T14:00:45Z
dc.date.available2021-10-20T14:00:45Z
dc.date.issued2012
dc.identifier.issn0946-7076
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/21219
dc.sourceIIOimport
dc.titleResonantly excited AlN-based microcantilevers for immunosensing
dc.typeJournal article
dc.contributor.imecauthorPobedinskas, Paulius
dc.contributor.imecauthorHaenen, Ken
dc.contributor.orcidimecPobedinskas, Paulius::0000-0001-8136-5172
dc.contributor.orcidimecHaenen, Ken::0000-0001-6711-7367
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage1089
dc.source.endpage1094
dc.source.journalMicrosystem Technologies
dc.source.issue7_8
dc.source.volume18
imec.availabilityPublished - open access


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