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Torsional mode MEMS resonator using thin film vacuum package

dc.contributor.authorOnishi, K.
dc.contributor.authorNaito, Yasuyuki
dc.contributor.authorYamakawa, T.
dc.contributor.authorNakamura, K.
dc.contributor.authorHelin, Philippe
dc.contributor.authorDe Coster, Jeroen
dc.contributor.authorHaspeslagh, Luc
dc.contributor.authorTilmans, Harrie
dc.date.accessioned2021-10-20T14:04:38Z
dc.date.available2021-10-20T14:04:38Z
dc.date.issued2012
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/21229
dc.sourceIIOimport
dc.titleTorsional mode MEMS resonator using thin film vacuum package
dc.typeOral presentation
dc.contributor.imecauthorHelin, Philippe
dc.contributor.imecauthorDe Coster, Jeroen
dc.contributor.imecauthorHaspeslagh, Luc
dc.contributor.imecauthorTilmans, Harrie
dc.contributor.orcidimecTilmans, Harrie::0000-0003-4240-4962
dc.source.peerreviewno
dc.source.conferenceimec-Handai Symposium
dc.source.conferencedate4/06/2012
dc.source.conferencelocationOsaka Japan
imec.availabilityPublished - imec


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