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On the Rseries extraction techniques for sub-22nm CMOS Finfet and SiGe technologies

dc.contributor.authorPantisano, Luigi
dc.contributor.authorZschaetzsch, Gerd
dc.contributor.authorHellings, Geert
dc.contributor.authorKrom, Raymond
dc.contributor.authorLee, Si Hyung
dc.contributor.authorRitzenthaler, Romain
dc.contributor.authorMitard, Jerome
dc.contributor.authorEneman, Geert
dc.contributor.authorRoussel, Philippe
dc.contributor.authorChiarella, Thomas
dc.contributor.authorRagnarsson, Lars-Ake
dc.contributor.authorTogo, Mitsuhiro
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorGroeseneken, Guido
dc.contributor.authorThean, Aaron
dc.contributor.authorHoriguchi, Naoto
dc.date.accessioned2021-10-20T14:14:08Z
dc.date.available2021-10-20T14:14:08Z
dc.date.issued2012
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/21252
dc.sourceIIOimport
dc.titleOn the Rseries extraction techniques for sub-22nm CMOS Finfet and SiGe technologies
dc.typeProceedings paper
dc.contributor.imecauthorHellings, Geert
dc.contributor.imecauthorRitzenthaler, Romain
dc.contributor.imecauthorMitard, Jerome
dc.contributor.imecauthorEneman, Geert
dc.contributor.imecauthorRoussel, Philippe
dc.contributor.imecauthorChiarella, Thomas
dc.contributor.imecauthorRagnarsson, Lars-Ake
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.imecauthorGroeseneken, Guido
dc.contributor.imecauthorThean, Aaron
dc.contributor.imecauthorHoriguchi, Naoto
dc.contributor.orcidimecHellings, Geert::0000-0002-5376-2119
dc.contributor.orcidimecRitzenthaler, Romain::0000-0002-8615-3272
dc.contributor.orcidimecMitard, Jerome::0000-0002-7422-079X
dc.contributor.orcidimecEneman, Geert::0000-0002-5849-3384
dc.contributor.orcidimecRoussel, Philippe::0000-0002-0402-8225
dc.contributor.orcidimecChiarella, Thomas::0000-0002-6155-9030
dc.contributor.orcidimecRagnarsson, Lars-Ake::0000-0003-1057-8140
dc.contributor.orcidimecHoriguchi, Naoto::0000-0001-5490-0416
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.conferenceInternational Symposium on VLSI Technology, Systems and Applications - VLSI-TSA
dc.source.conferencedate23/04/2012
dc.source.conferencelocationHsinchu City Taiwan
imec.availabilityPublished - open access


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