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Thermally insulated structures for IR bolometers, made of polycrystalline silicon germanium alloys

dc.contributor.authorSedky, Sherif
dc.contributor.authorFiorini, Paolo
dc.contributor.authorCaymax, Matty
dc.contributor.authorVerbist, Agnes
dc.contributor.authorBaert, Kris
dc.date.accessioned2021-09-30T09:30:08Z
dc.date.available2021-09-30T09:30:08Z
dc.date.issued1997
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/2126
dc.sourceIIOimport
dc.titleThermally insulated structures for IR bolometers, made of polycrystalline silicon germanium alloys
dc.typeProceedings paper
dc.contributor.imecauthorCaymax, Matty
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage237
dc.source.endpage240
dc.source.conferenceInternational Conference on Solid-State Sensors and Actuators - Transducers
dc.source.conferencedate16/06/1997
dc.source.conferencelocationChicago, IL USA
imec.availabilityPublished - open access


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