IR micro bolometers, made of polycrystalline silicon germanium alloys

Thumbnail
View/open
Metadata
Show full item record
Authors
Sedky, Sherif; Fiorini, Paolo; Caymax, Matty; Verbist, Agnes; Baert, Kris; Hermans, Lou
Conference
Proceedings of the 2nd Round Table of Micro-Nano Technologies for Space
Title
IR micro bolometers, made of polycrystalline silicon germanium alloys
Publication type
Proceedings paper
Embargo date
9999-12-31
Collections