Authors

Pawlak, Malgorzata; Swerts, Johan; Popovici, Mihaela Ioana; Kaczer, Ben; Kim, Min-Soo; Wang, Wan-Chih; Tomida, Kazuyuki; Govoreanu, Bogdan; Delmotte, Joris; Afanas'ev, Valeri; Schaekers, Marc; Vandervorst, Wilfried; Kittl, Jorge

ISSN

0003-6951

Issue

4

Journal

Applied Physics Letters

Volume

101

Title

Direct physical evidence of mechanisms of leakage and equivalent oxide thickness reduction in metal-insulator-metal capacitors based on RuOx/TiOx/SrxTiyOz/TiN stacks

Publication type

Journal article

Embargo date

9999-12-31