Vanadium oxide thin films grown by ALD using TEMAV and O3 or H2O precursors

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Authors
Peter, Antony; Toeller, Michael; Radu, Iuliana; Adelmann, Christoph; Schaekers, Marc; Meersschaut, Johan; Conard, Thierry; Jurczak, Gosia; Van Elshocht, Sven
Conference
AVS 59th Annual International Symposium and Exhibition
Title
Vanadium oxide thin films grown by ALD using TEMAV and O3 or H2O precursors
Publication type
Meeting abstract
Embargo date
9999-12-31
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