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Wafer bow of substrate transfer process for GaNLED on Si 8 inch

dc.contributor.authorPham, Nga
dc.contributor.authorRosmeulen, Maarten
dc.contributor.authorBryce, George
dc.contributor.authorSabuncuoglu Tezcan, Deniz
dc.contributor.authorOsman, Haris
dc.date.accessioned2021-10-20T14:33:14Z
dc.date.available2021-10-20T14:33:14Z
dc.date.issued2012
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/21298
dc.sourceIIOimport
dc.titleWafer bow of substrate transfer process for GaNLED on Si 8 inch
dc.typeProceedings paper
dc.contributor.imecauthorPham, Nga
dc.contributor.imecauthorRosmeulen, Maarten
dc.contributor.imecauthorBryce, George
dc.contributor.imecauthorSabuncuoglu Tezcan, Deniz
dc.contributor.imecauthorOsman, Haris
dc.contributor.orcidimecRosmeulen, Maarten::0000-0002-3663-7439
dc.contributor.orcidimecSabuncuoglu Tezcan, Deniz::0000-0002-9237-7862
dc.source.peerreviewyes
dc.source.conference14th IEEE Electronics Packaging Technology Conference - EPTC
dc.source.conferencedate5/12/2012
dc.source.conferencelocationSingapore
imec.availabilityPublished - imec


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