Assessment of challenges in EUV resist outgassing and contamination characterization

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Authors

Pollentier, Ivan; Lokasani, Ragava; Gronheid, Roel

ISSN

0914-9244

Issue

5

Journal

Journal of Photopolymer Science and Technology

Volume

25

Title

Assessment of challenges in EUV resist outgassing and contamination characterization

Publication type

Journal article

Embargo date

9999-12-31

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