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Assessment of challenges in EUV resist outgassing and contamination characterization

dc.contributor.authorPollentier, Ivan
dc.contributor.authorLokasani, Ragava
dc.contributor.authorGronheid, Roel
dc.date.accessioned2021-10-20T14:43:19Z
dc.date.available2021-10-20T14:43:19Z
dc.date.issued2012
dc.identifier.issn0914-9244
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/21321
dc.sourceIIOimport
dc.titleAssessment of challenges in EUV resist outgassing and contamination characterization
dc.typeJournal article
dc.contributor.imecauthorPollentier, Ivan
dc.contributor.imecauthorGronheid, Roel
dc.contributor.orcidimecPollentier, Ivan::0000-0002-4266-6500
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage609
dc.source.endpage616
dc.source.journalJournal of Photopolymer Science and Technology
dc.source.issue5
dc.source.volume25
imec.availabilityPublished - open access


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