Publication:

Scalability of ALD strontium titanate films

Date

2012
Meeting abstract
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Author(s)

Popovici, Mihaela Ioana  
;
Swerts, Johan  
;
Tomida, Kazuyuki  
;
Kim, Min-Soo  
;
Delabie, Annelies  
;
Meersschaut, Johan  
;
Franquet, Alexis  
;
Kaczer, Ben  
;
Jurczak, Gosia  
;
Van Elshocht, Sven  

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1873 since deposited on 2021-10-20
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