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An approach to produce a stack of photo definable polyimide based flat UTCPs

dc.contributor.authorPriyabadini, Swarnakamal
dc.contributor.authorSterken, Tom
dc.contributor.authorWang, Liang
dc.contributor.authorDhaenens, Kristof
dc.contributor.authorVandecasteele, Bjorn
dc.contributor.authorVan Put, Steven
dc.contributor.authorPetersen, A.E.
dc.contributor.authorVanfleteren, Jan
dc.date.accessioned2021-10-20T14:49:23Z
dc.date.available2021-10-20T14:49:23Z
dc.date.issued2012
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/21335
dc.sourceIIOimport
dc.titleAn approach to produce a stack of photo definable polyimide based flat UTCPs
dc.typeProceedings paper
dc.contributor.imecauthorSterken, Tom
dc.contributor.imecauthorDhaenens, Kristof
dc.contributor.imecauthorVandecasteele, Bjorn
dc.contributor.imecauthorVan Put, Steven
dc.contributor.imecauthorVanfleteren, Jan
dc.contributor.orcidimecVanfleteren, Jan::0000-0002-9654-7304
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.conference4th Electronics System Integration technologies Conference - ESTC
dc.source.conferencedate17/09/2012
dc.source.conferencelocationAmsterdam The Netherlands
imec.availabilityPublished - open access


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