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Hot hole induced degradation of oxynitrides

dc.contributor.authorSii, H. K.
dc.contributor.authorZhang, Jenny
dc.contributor.authorGroeseneken, Guido
dc.date.accessioned2021-09-30T09:31:31Z
dc.date.available2021-09-30T09:31:31Z
dc.date.issued1997
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/2135
dc.sourceIIOimport
dc.titleHot hole induced degradation of oxynitrides
dc.typeOral presentation
dc.contributor.imecauthorGroeseneken, Guido
dc.source.peerreviewno
dc.source.conferenceSISC-Conference; December 1997; Charleston, South-Carolina, USA.
dc.source.conferencelocation
imec.availabilityPublished - imec


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