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Boron delta-doping dependence on Si/SiGe resonant interband tunneling diodes grown by chemical vapor deposition
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Authors
Ramesh, Anisha
;
Growden, Tyler
;
Berger, Paul R.
;
Loo, Roger
;
Vandervorst, Wilfried
;
Douhard, Bastien
;
Caymax, Matty
ISSN
0018-9383
Issue
3
Journal
IEEE Transactions on Electron Devices
Volume
59
Title
Boron delta-doping dependence on Si/SiGe resonant interband tunneling diodes grown by chemical vapor deposition
Publication type
Journal article
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