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SiGe MEMS accelerometers combining a large bandwidth with a high capacitive sensitivity

dc.contributor.authorRay Chaudhuri, Ashesh
dc.contributor.authorSeveri, Simone
dc.contributor.authorErismis, Mehmet Akif
dc.contributor.authorFrancis, Laurent
dc.contributor.authorWitvrouw, Ann
dc.date.accessioned2021-10-20T15:09:43Z
dc.date.available2021-10-20T15:09:43Z
dc.date.issued2012
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/21384
dc.sourceIIOimport
dc.titleSiGe MEMS accelerometers combining a large bandwidth with a high capacitive sensitivity
dc.typeProceedings paper
dc.contributor.imecauthorRay Chaudhuri, Ashesh
dc.contributor.imecauthorSeveri, Simone
dc.source.peerreviewyes
dc.source.beginpage742
dc.source.endpage745
dc.source.conference26th European Conference on Solid-State Transducers - EUROSENSOR
dc.source.conferencedate9/09/2012
dc.source.conferencelocationKrakow Poland
dc.identifier.urlwww.sciencedirect.com
imec.availabilityPublished - imec
imec.internalnotesProcedia Engineering; Vol. 47


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