All track directed self-assembly of block copolymers: process flow and origin of defects

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Authors
Rincon Delgadillo, Paulina; Gronheid, Roel; Thode, Christopher J.; Wu, Hengpeng; Cao, Yi; Somervell, Mark; Nafus, Kathleen; Nealy, Paul F.
Conference
Alternative Lithographic Technologies IV
Title
All track directed self-assembly of block copolymers: process flow and origin of defects
Publication type
Proceedings paper
Embargo date
9999-12-31
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