Show simple item record

Low-power DRAM-compatible replacement gate high-k/metal gate stacks

dc.contributor.authorRitzenthaler, Romain
dc.contributor.authorSchram, Tom
dc.contributor.authorBury, Erik
dc.contributor.authorMitard, Jerome
dc.contributor.authorRagnarsson, Lars-Ake
dc.contributor.authorGroeseneken, Guido
dc.contributor.authorHoriguchi, Naoto
dc.contributor.authorThean, Aaron
dc.contributor.authorSpessot, Alessio
dc.contributor.authorCaillat, Christian
dc.contributor.authorSrividya, Vidya
dc.contributor.authorFazan, Pierre
dc.date.accessioned2021-10-20T15:15:22Z
dc.date.available2021-10-20T15:15:22Z
dc.date.issued2012
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/21396
dc.sourceIIOimport
dc.titleLow-power DRAM-compatible replacement gate high-k/metal gate stacks
dc.typeProceedings paper
dc.contributor.imecauthorRitzenthaler, Romain
dc.contributor.imecauthorSchram, Tom
dc.contributor.imecauthorBury, Erik
dc.contributor.imecauthorMitard, Jerome
dc.contributor.imecauthorRagnarsson, Lars-Ake
dc.contributor.imecauthorGroeseneken, Guido
dc.contributor.imecauthorHoriguchi, Naoto
dc.contributor.imecauthorThean, Aaron
dc.contributor.imecauthorSpessot, Alessio
dc.contributor.imecauthorFazan, Pierre
dc.contributor.orcidimecRitzenthaler, Romain::0000-0002-8615-3272
dc.contributor.orcidimecSchram, Tom::0000-0003-1533-7055
dc.contributor.orcidimecBury, Erik::0000-0002-5847-3949
dc.contributor.orcidimecMitard, Jerome::0000-0002-7422-079X
dc.contributor.orcidimecRagnarsson, Lars-Ake::0000-0003-1057-8140
dc.contributor.orcidimecHoriguchi, Naoto::0000-0001-5490-0416
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage242
dc.source.endpage245
dc.source.conference42nd European Solid-State Device Research Conference - ESSDERC
dc.source.conferencedate17/09/2012
dc.source.conferencelocationBordeaux France
imec.availabilityPublished - open access


Files in this item

Thumbnail
Name:
24919.pdf
Size:
652.8Kb
Format:
PDF
View/open

This item appears in the following collection(s)

Show simple item record