Authors

Rochus, Veronique; Jansen, Roelof; Rottenberg, Xavier; Tilmans, Harrie; Ranvier, Sylvain; Lamy, Hervé; Rochus, Pierre

Conference

13th Int. Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics - EuroSimE

Title

Comparison of Ni- and SiGe-based MEMS magnetometers

Publication type

Proceedings paper

Embargo date

9999-12-31