GIDL behavior in UTBOX SOI devices with high-k/metal gate stacks

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Authors
Rodrigues, M.; Galeti, M.; Martino, J.A.; Collaert, Nadine; Aoulaiche, Marc; Simoen, Eddy; Claeys, Cor
Conference
8th European Workshop on Silicon-on-Insulator Technology, Devices and Circuits - EUROSOI
Title
GIDL behavior in UTBOX SOI devices with high-k/metal gate stacks
Publication type
Proceedings paper
Embargo date
9999-12-31
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