In situ studies of Al2O3 ALD growth and self-cleaning on III-V surfaces by STM and XPS

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Authors
Rodriguez, Leonard; De Clercq, Astrid; Tallarida, Massimo; Cuypers, Daniel; Locquet, Jean-Pierre; Van Elshocht, Sven; Adelmann, Christoph; Caymax, Matty
Conference
AVS 59th International Symposium & Exhibition
Title
In situ studies of Al2O3 ALD growth and self-cleaning on III-V surfaces by STM and XPS
Publication type
Meeting abstract
Embargo date
9999-12-31
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