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Process study of gadolinium aluminate atomic layer deposition from the gadolinium tris-diisopropylacetamidinate precursor
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Authors
Rodriguez, Leonard
;
Franquet, Alexis
;
Brijs, Bert
;
Tielens, Hilde
;
Adelmann, Christoph
ISSN
0734-2101
Issue
1
Journal
Journal of Vacuum Science and Technology A
Volume
30
Title
Process study of gadolinium aluminate atomic layer deposition from the gadolinium tris-diisopropylacetamidinate precursor
Publication type
Journal article
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