Authors

Rottenberg, Xavier; Erismis, Mehmet Akif; Czarnecki, Piotr; Helin, Philippe; Verbist, Agnes; Tilmans, Harrie

Conference

13th Int. Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics - EuroSimE

Title

Consistent analytical model for single and dual thickness capacitive micromachined ultrasound transducers (cMUT)

Publication type

Proceedings paper

Embargo date

9999-12-31