Low motional impedance bulk acoustic resonators based on metamaterials

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Authors
Rottenberg, Xavier; Jansen, Roelof; Rochus, Veronique; Figeys, Bruno; Nauwelaers, Bart; Tilmans, Harrie
Conference
NANOTECH: Modeling & Simulation of Microsystems - MSM
Title
Low motional impedance bulk acoustic resonators based on metamaterials
Publication type
Proceedings paper
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