Novel nano-electromechanical relay design procedure for logic and memory applications

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Authors
Rottenberg, Xavier; Rochus, Veronique; Jansen, Roelof; Ramezani, Maliheh; Severi, Simone; Witvrouw, Ann; Tilmans, Harrie
Conference
NANOTECH: Modeling & Simulation of Microsystems (MSM)
Title
Novel nano-electromechanical relay design procedure for logic and memory applications
Publication type
Proceedings paper
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