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Reliability test methodology for MEMS and MOEMS under electrical overstress and electrostatic discharge stress

dc.contributor.authorSangameswaran, Sandeep
dc.contributor.authorDe Coster, Jeroen
dc.contributor.authorGroeseneken, Guido
dc.contributor.authorDe Wolf, Ingrid
dc.date.accessioned2021-10-20T15:41:54Z
dc.date.available2021-10-20T15:41:54Z
dc.date.issued2012
dc.identifier.issn1537-1646
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/21453
dc.sourceIIOimport
dc.titleReliability test methodology for MEMS and MOEMS under electrical overstress and electrostatic discharge stress
dc.typeJournal article
dc.contributor.imecauthorDe Coster, Jeroen
dc.contributor.imecauthorGroeseneken, Guido
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.orcidimecDe Wolf, Ingrid::0000-0003-3822-5953
dc.source.peerreviewyes
dc.source.beginpage21204
dc.source.journalJournal of Micro/Nanolithography MEMS and MOEMS
dc.source.issue2
dc.source.volume11
imec.availabilityPublished - imec
imec.internalnotesSpecial Section: Reliability, Packaging, Testing and Characterization of MEMS


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