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Reliability test methodology for MEMS and MOEMS under electrical overstress and electrostatic discharge stress
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Authors
Sangameswaran, Sandeep
;
De Coster, Jeroen
;
Groeseneken, Guido
;
De Wolf, Ingrid
ISSN
1537-1646
Issue
2
Journal
Journal of Micro/Nanolithography MEMS and MOEMS
Volume
11
Title
Reliability test methodology for MEMS and MOEMS under electrical overstress and electrostatic discharge stress
Publication type
Journal article
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