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Reliability test methodology for MEMS and MOEMS under electrical overstress and electrostatic discharge stress
Publication:
Reliability test methodology for MEMS and MOEMS under electrical overstress and electrostatic discharge stress
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Date
2012
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Sangameswaran, Sandeep
;
De Coster, Jeroen
;
Groeseneken, Guido
;
De Wolf, Ingrid
Journal
Journal of Micro/Nanolithography MEMS and MOEMS
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1817
since deposited on 2021-10-20
Acq. date: 2025-12-16
Citations
Metrics
Views
1817
since deposited on 2021-10-20
Acq. date: 2025-12-16
Citations