Publication:

Reliability test methodology for MEMS and MOEMS under electrical overstress and electrostatic discharge stress

Date

2012
Journal article
Simple item page Full metadata Statistics
Loading...
Thumbnail Image

Author(s)

Sangameswaran, Sandeep
;
De Coster, Jeroen  
;
Groeseneken, Guido  
;
De Wolf, Ingrid  

Journal

Journal of Micro/Nanolithography MEMS and MOEMS

Abstract

Description

Statistics

Views

1818 since deposited on 2021-10-20
Acq. date: 2026-05-18

Citations

Statistics

Views

1818 since deposited on 2021-10-20
Acq. date: 2026-05-18

Citations