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Design and fabrication of SiGe MEMS structures with high intrinsic ESD robustness

dc.contributor.authorSangameswaran, Sandeep
dc.contributor.authorDe Coster, Jeroen
dc.contributor.authorWitvrouw, Ann
dc.contributor.authorGroeseneken, Guido
dc.contributor.authorDe Wolf, Ingrid
dc.date.accessioned2021-10-20T15:42:21Z
dc.date.available2021-10-20T15:42:21Z
dc.date.issued2012
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/21454
dc.sourceIIOimport
dc.titleDesign and fabrication of SiGe MEMS structures with high intrinsic ESD robustness
dc.typeProceedings paper
dc.contributor.imecauthorDe Coster, Jeroen
dc.contributor.imecauthorGroeseneken, Guido
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.orcidimecDe Wolf, Ingrid::0000-0003-3822-5953
dc.source.peerreviewyes
dc.source.beginpage3.00E-04
dc.source.conferenceIEEE International Reliability Physics Symposium - IRPS
dc.source.conferencedate15/04/2012
dc.source.conferencelocationAnaheim, CA USA
imec.availabilityPublished - imec


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